2.2.4 MOS Charge Control Model
Well above threshold, the charge density of the mobile carriers in the inversion layer can
be calculated using the parallel plate charge control model of (2.28). This model gives an
adequate description for the strong inversion regime of the MOS capacitor, but fails for
applied voltages near and below threshold (i.e. in the weak inversion and depletion
regimes). Several expressions have been proposed for a unified charge control model
(UCCM) that covers all the regimes of operation, including the following:
where, a i c » c is approximately the insulator capacitance per unit area (with a small
correction for the finite vertical extent of the inversion channel), n0 = ns(V = VT) is the
density of minority carriers per unit area at threshold, and h is the socalled
subthreshold ideality factor, also known as the subthreshold swing parameter. The ideality factor
accounts for the subthreshold division of the applied voltage between the gate insulator
and the depletion layer, and the 1/h represents the fraction of this voltage that contributes
to the interface potential. A simplified analysis gives
This expression reproduces the correct limiting behaviour both in strong inversion and
the subthreshold regime, although it deviates slightly from (2.34) near threshold. The
various charge control expressions of the MOS capacitor are compared in the above
figure.
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